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Dissolution of phenolic polymers in aqueous base: the influence of polymer structure

Author(s):
McAdams,C.L. ( Univ.of Texas at Austin )
Flanagin,L.W. ( Univ.of Texas at Austin )
Henderson,C.L. ( Univ.of Texas at Austin )
Pawlowski,A.R. ( Univ.of Texas at Austin )
Tsiartas,P.C. ( Univ.of Texas at Austin )
Willson,C.G. ( Univ.of Texas at Austin )
1 more
Publication title:
Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3333
Pub. Year:
1998
Vol.:
Part 2
Page(from):
1171
Page(to):
1179
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427786 [0819427780]
Language:
English
Call no.:
P63600/3333
Type:
Conference Proceedings

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