Progress in 193-nm top-surface imaging process development

Progress in 193-nm top-surface imaging process development

Author(s):

Hutchinson,J.M. ( Intel Corp. )

Rao,V. ( Intel Corp. )

Zhang,G. ( Intel Corp. )

Pawloski,A.R. ( Intel Corp. )

Fonseca,C.A. ( Intel Corp. )

Chambers,J. ( Intel Corp. )

Holl,S.M. ( Intel Corp. )

Das,S. ( Intel Corp. )

Henderson,C.C. ( Sandia National Labs. )

Wheeler,D.R. ( Sandia National Labs. )

5 more

Publication title:

Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3333

Pub. Year:

1998

Vol.:

Part 1

Page(from):

165

Page(to):

175

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427786 [0819427780]

Language:

English

Call no.:

P63600/3333

Type:

Conference Proceedings

Details

TDL ID:	ZA00018317
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Advances in resist technology and processing
Conf. info. (Number):	1998 : 15th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1998.02.23-1998.02.25

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