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Design and study of water-soluble positive- and negative-tone imaging materials

Author(s):
Havard,J.M. ( Univ.of California/Berkeley )
Pasini,D. ( Univ.of California/Berkeley )
Frechet,J.M.J. ( Univ.of California/Berkeley )
Medeiros,D.R. ( Univ.of Texas at Austin )
Patterson,K. ( Univ.of Texas at Austin )
Yamada,S. ( Univ.of Texas at Austin )
Willson,C.G. ( Univ.of Texas at Austin )
2 more
Publication title:
Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3333
Pub. Year:
1998
Vol.:
Part 1
Page(from):
111
Page(to):
121
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427786 [0819427780]
Language:
English
Call no.:
P63600/3333
Type:
Conference Proceedings

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