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SPICE Level 3 and BSIM3v3.1 characterization of monolithic integrated CMOS-MEMS devices

Author(s):
Staple,B.D. ( Sandia National Labs. )
Watts,H.A. ( Sandia National Labs. )
Dyck,C.W. ( Sandia National Labs. )
Griego,A.P. ( Sandia National Labs. )
Hewlett,F.W. ( Sandia National Labs. )
Smith,J.H. ( Sandia National Labs. )
1 more
Publication title:
Materials and Device Characterization in Micromachining
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3512
Pub. Year:
1998
Page(from):
410
Page(to):
420
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429711 [0819429716]
Language:
English
Call no.:
P63600/3512
Type:
Conference Proceedings

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