A hinged-pad test structure for sliding friction measurement in micromachining

A hinged-pad test structure for sliding friction measurement in micromachining

Author(s):

de Boer,M.P. ( Sandia National Labs. )
Redmond,J.M. ( Sandia National Labs. )
Michalske,T.A. ( Sandia National Labs. )

Publication title:

Materials and Device Characterization in Micromachining

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3512

Pub. Year:

1998

Page(from):

241

Page(to):

250

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429711 [0819429716]

Language:

English

Call no.:

P63600/3512

Type:

Conference Proceedings

Details

TDL ID:	ZA00018307
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Materials and Device Characterization in Micromachining
Conf. info. (Number):	1998
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1998.09.21-1998.09.22

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