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Micromachined aperture probe for combined atomic force and near-field scanning optical microscopy (AFM/NSOM)

Author(s):
Drews,D. ( Institute of Microtechnology Mainz GmbH (Germany) )
Noell,W. ( Institute of Microtechnology Mainz GmbH (Germany) )
Ehrfeld,W. ( Institute of Microtechnology Mainz GmbH (Germany) )
Lacher,M. ( Institute of Microtechnology Mainz GmbH (Germany) )
Mayr,K. ( Institute of Microtechnology Mainz GmbH (Germany) )
Marti,O. ( Univ.of Ulm (Germany) )
Serwatzy,C. ( Univ.of Ulm (Germany) )
Abraham,M. ( Nanophotonics AG (Germany) )
3 more
Publication title:
Materials and Device Characterization in Micromachining
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3512
Pub. Year:
1998
Page(from):
76
Page(to):
83
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429711 [0819429716]
Language:
English
Call no.:
P63600/3512
Type:
Conference Proceedings

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