Blank Cover Image

Process Factors Contributing to Variations in Molecular Weight, Dissolution Rate, and Glass Transition in mte/para Naphthol Novolac Resins Used in Photoresists

Author(s):
Holloway D. M. ( University of Massachusetts-Lowell )  
Publication title:
ANTEC 93 : Be in that number : conference proceedings : New Orleans, May 9-13, 1993
Title of ser.:
Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.:
39
Pub. Year:
1993
Vol.:
1
Page(from):
1654
Page(to):
1656
Pages:
3
Pub. info.:
Brookfield Center, CT: Society of Plastics Engineers, Inc. (SPE)
Language:
English
Call no.:
S42700/932082
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings REMOVAL OF NOVOLAC-BASED PHOTORESIST FILM USING LOW MOLECULAR WEIGHT ALCOHOLS

Kamal, T., Hess, D.W.

Electrochemical Society
7 Conference Proceedings Synthesis of novolac resin by acid removal after condensation(ARAC)process

Cook,M.M., Rahman,M.D., Khanna,D.N.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Factors affecting the dissolution rate of novolac resins II:developer composition effects

Henderson,C.L., Tsiartas,P.C., Simpson,L.L., Clayton,K.D., Pancholi,S., Pawlowski,A.R., Willson,C.G.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Engineering Optimization of Polyglutarimide for Photoresist Applications

Holloway D. M.

Society of Plastics Engineers, Inc. (SPE)
3 Conference Proceedings Selectively esterified novolac resins:a study of resist properties as a function of novolac molecular weight and composition

Jeffries,A.T.III, Brzozowy,D.J., Beauchemin,B.T., Naiini,A.A., Fitzgerald,E.A., Gallagher-Wetmore,P.M.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Tailoring of novolac resins for photoresist applications using a two-step synthesis procedure

Bahr,G., Westerwelle,U., Grutzner,G.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Effect of molecular weight distribution on the dissolution properties of novolac blends

P.C. Tsiartas, L.L. Simpson, A. Qin, C.G. Willson, R.D. Allen

Society of Photo-optical Instrumentation Engineers
10 Conference Proceedings The Variation of Glass Transition as a Function of the Degree of Cure in an Epoxy-Novolac System

Hale, A., Macosko, C. W., Bair, H. E.

Society of Plastics Engineers, Inc. (SPE)
5 Conference Proceedings Effect of resin molecular weight on novolak dissolution

Shih,H.-Y., Zhuang,H., Reiser,A., Gallagher-Wetmore,P.M.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Structure and property relationships of fractionated novolac resins

Chen,K.-J.R., Kwong,R.W., Jordhamo,G., Allen,R.D., Gallagher-Wetmore,P.M.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Novel process of isolating novolac resin fractions

Rahman,M.D., Lu,P.-H., Cook,M.M.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Effect of low-molecular-weight dissolution-promoting compounds in DNQ-novolac positive resist

Kawabe,Y., Tan,S., Nishiyama,F., Sakaguchi,S., Kokubo,T., Blakeney,A.J., Ferreira,L.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12