Process Factors Contributing to Variations in Molecular Weight, Dissolution Rate, and Glass Transition in mte/para Naphthol Novolac Resins Used in Photoresists
- Author(s):
- Holloway D. M. ( University of Massachusetts-Lowell )
- Publication title:
- ANTEC 93 : Be in that number : conference proceedings : New Orleans, May 9-13, 1993
- Title of ser.:
- Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
- Ser. no.:
- 39
- Pub. Year:
- 1993
- Vol.:
- 1
- Page(from):
- 1654
- Page(to):
- 1656
- Pages:
- 3
- Pub. info.:
- Brookfield Center, CT: Society of Plastics Engineers, Inc. (SPE)
- Language:
- English
- Call no.:
- S42700/932082
- Type:
- Conference Proceedings
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