ION BEAM ASSISTED THIN FILM DEPOSITION : FUNDAMENTALS AND APPLICATIONS OF IBAD PROCESSING
- Author(s):
- Hirvonen K. J.
- Publication title:
- Materials and processes for surface and interface engineering
- Title of ser.:
- NATO ASI series. Series E, Applied sciences
- Ser. no.:
- 290
- Pub. Year:
- 1995
- Page(from):
- 307
- Page(to):
- 346
- Pages:
- 40
- Pub. info.:
- Dordrecht: Kluwer Academic Publishers
- ISSN:
- 0168132X
- ISBN:
- 9780792334583 [0792334582]
- Language:
- English
- Call no.:
- N11482/290
- Type:
- Conference Proceedings
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