HETEROEPITAXIAL GROWTH OF SiC ON Si AND ITS APPLICATION

Author(s):

Matsunami H.  

Publication title:

Heterostructures on silicon : one step further with silicon

Title of ser.:

NATO ASI series. Series E, Applied sciences

Ser. no.:

160

Pub. Year:

1989

Page(from):

311

Page(to):

321

Pages:

11

Pub. info.:

Dordrecht: Kluwer Academic Publishers

ISSN:

0168132X

ISBN:

9780792301240 [0792301242]

Language:

English

Call no.:

N11482/160

Type:

Conference Proceedings