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H-Implantation-Induced Damage in Si

Author(s):
Keinonen J.
Hautala M.
Rauhala E.
Karttunen V.
Kuronen A.
Raisanen J.
Lahtinen J.
Vehanen A.
Punkka E.
Hautojarvi P.
5 more
Publication title:
Nuclear physics applications on materials science
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
144
Pub. Year:
1988
Page(from):
439
Page(to):
440
Pages:
2
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9789024737031 [9024737036]
Language:
English
Call no.:
N11482/144
Type:
Conference Proceedings

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