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Beam Processing Techniques Applied to Crystal Silicon Substrates

Author(s):
Soncini G.  
Publication title:
Large scale integrated circuits technology : state of the art and prospects : proceedings of the NATO Advanced Study Institute on "Large Scale Integrated Circuits Technology: State of the Art and Prospects", Erice, Italy, July 15-27, 1981
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
55
Pub. Year:
1982
Page(from):
254
Page(to):
280
Pages:
27
Pub. info.:
The Hague: Martinus Nijhoff Publishers
ISSN:
0168132X
ISBN:
9789024727254 [9024727251]
Language:
English
Call no.:
N11482/55
Type:
Conference Proceedings

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