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Nondestructive room-temperature characterization of wafer-sized ?-? semiconductor device structures using contactless electromodulation and surface photovoltage spectroscopy

Author(s):
Pollak,F.H. ( CUNY/Brooklyn College )  
Publication title:
Physics and simulation of optoelectronic devices VIII : 24-28 January 2000, San Jose, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3944
Pub. Year:
2000
Vol.:
Part1
Page(from):
408
Page(to):
422
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819435613 [0819435619]
Language:
English
Call no.:
P63600/3944
Type:
Conference Proceedings

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