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Collaborative design software for MEMS

Author(s):
Tay,F.E.H. ( National Univ.of Singapore )  
Publication title:
Education in microelectronics and MEMS : 28-29 October 1999, Royal Pines Resort, Queensland, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3894
Pub. Year:
1999
Page(from):
152
Page(to):
158
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434951 [0819434957]
Language:
English
Call no.:
P63600/3894
Type:
Conference Proceedings

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