Influence of metal deposition temperature on deep-submicrometer metal lithography
- Author(s):
- Subramaniam,V. ( VLSI Technology Inc./Philips Semiconductor )
- Siems,D.D.
- Karnett,M.P.
- Maheshwary,S.R.
- Sur,H.
- Publication title:
- In-Line Methods and Monitors for Process and Yield Improvement
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3884
- Pub. Year:
- 1999
- Page(from):
- 298
- Page(to):
- 305
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434814 [0819434817]
- Language:
- English
- Call no.:
- P63600/3884
- Type:
- Conference Proceedings
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