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Online characterization of HSG polysilicon by AFM

Author(s):
Ge,L.M. ( Digital Instruments/Veeco Metrology Group )
el-Hamdi,M.A.
Alvis,R.
Sawaya,S.
Gifford,D.
Lainez,R.
Hendrix,L.
2 more
Publication title:
In-Line Methods and Monitors for Process and Yield Improvement
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3884
Pub. Year:
1999
Page(from):
265
Page(to):
268
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434814 [0819434817]
Language:
English
Call no.:
P63600/3884
Type:
Conference Proceedings

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