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Failure analysis of wafer-level reliability testing failure

Author(s):
Oh,C.K. ( Chartered Semiconductor Manufacturing Ltd. )
Neo,S.P.
Bi,J.H.
Wu,Z.M.
Goh,L.C.
Redkar,S.
1 more
Publication title:
In-Line Methods and Monitors for Process and Yield Improvement
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3884
Pub. Year:
1999
Page(from):
228
Page(to):
235
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434814 [0819434817]
Language:
English
Call no.:
P63600/3884
Type:
Conference Proceedings

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