Fabrication of pop-up detector arrays on Si wafers

Fabrication of pop-up detector arrays on Si wafers

Author(s):

Li,M.J. ( Raytheon STX/NASA Goddard Space Fiight Ctr. )

Publication title:

Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3874

Pub. Year:

1999

Page(from):

422

Page(to):

431

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819434715 [081943471X]

Language:

English

Call no.:

P63600/3874

Type:

Conference Proceedings

Details

TDL ID:	ZA00018100
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Micromachining and microfabrication process technology
Conf. info. (Number):	1999 : 5th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1999.09.20-1999.09.22

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