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SCALPEL mask blank fabrication

Author(s):
Saunders,T.E. ( Lucent Technologies/Bell Labs. )
Blakey,M.I.
Caminos,C.
Bogart,G.R.
Farrow,R.C.
Knurek,C.S.
Kornblit,A.
Liddle,J.A.
Novembre,A.E.
Peabody,M.L.
5 more
Publication title:
Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3874
Pub. Year:
1999
Page(from):
248
Page(to):
255
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434715 [081943471X]
Language:
English
Call no.:
P63600/3874
Type:
Conference Proceedings

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