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LIGA:metals,plastics,and ceramics

Author(s):
Hruby,J.M. ( Sandia National Labs. )
Griffiths,S.K.
Domeier,L.A.
Morales,A.M.
Boehme,D.R.
Bankert,M.A.
Bonivert,W.D.
Hachmann,J.T.
Skala,D.M.
Ting,A.
5 more
Publication title:
Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3874
Pub. Year:
1999
Page(from):
32
Page(to):
43
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434715 [081943471X]
Language:
English
Call no.:
P63600/3874
Type:
Conference Proceedings

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