Polarization of light scattered by particles on silicon wafers

Author(s):

• Sung,L. ( National Institute of Standards and Technology and Univ.of Maryland/College Park )
• Mulholland,C.W.
• Germer,T.A.

Publication title:

Surface characterization for computer disks, wafers, and flat panel displays : 28 January 1999, San Jose, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3619

Pub. Year:

1999

Page(from):

80

Page(to):

89

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819430892 [0819430897]

Language:

English

Call no.:

P63600/3619

Type:

Conference Proceedings