Modeled and measured scatter from vias

Modeled and measured scatter from vias

Author(s):

Publication title:

Surface characterization for computer disks, wafers, and flat panel displays : 28 January 1999, San Jose, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3619

Pub. Year:

1999

Page(from):

65

Page(to):

71

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819430892 [0819430897]

Language:

English

Call no.:

P63600/3619

Type:

Conference Proceedings

Details

TDL ID:	ZA00018077
Series ID:	PA00000029
Conf. info. (Name):	Photonics West : Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays
Conf. info. (Number):	1999
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	1999.01.28

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