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Depth profiling of sol-gel multilayers on fused silica using dynamic SIMS and SNMS

Author(s):
Publication title:
Third International Conference on Solid State Lasers for Application to Inertial Confinement Fusion
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3492
Pub. Year:
1999
Vol.:
Part1
Page(from):
238
Page(to):
243
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429513 [0819429511]
Language:
English
Call no.:
P63600/3492
Type:
Conference Proceedings

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