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Assembly and alignment of three-aspherical-mirror optics for extreme ultraviolet projection lithography

Author(s):
Sugisaki,K. ( Nikon Corp. )
Oshino,T.
Murakami,K.
Watanabe,T.
Kinoshita,H.
Miyafuji,A.
Irie,S.
Shirayone,S.
3 more
Publication title:
Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3997
Pub. Year:
2000
Page(from):
751
Page(to):
758
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436153 [0819436151]
Language:
English
Call no.:
P63600/3997
Type:
Conference Proceedings

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