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Development of an electric capillary discharge source

Author(s):
Fornaciari,N.R. ( Sandia National Labs. )
Chang,J.J.
Folk,D.R.
Gianoulakis,S.E.
Goldsmith,J.E.M.
Kubiak,G.D.
Long,B.C.
O'Connell,D.J.
Shimkaveg,G.M.
Silfvast,W.T.
Stewartka,K.D.
6 more
Publication title:
Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3997
Pub. Year:
2000
Page(from):
120
Page(to):
125
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436153 [0819436151]
Language:
English
Call no.:
P63600/3997
Type:
Conference Proceedings

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