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Thin film dielectrics for electronics using combustion chemical vapor deposition

Author(s):
Lin, W-Y.
Huang, H.
Cullen, D. K.
Shoup, S. S.
Cousins, D.
Schmitt, J. J.
Hunt, A. T.
Romanofsky, R. R.
VanKeuls, F. W.
Miranda, F. A.
Mueller, C. H.
6 more
Publication title:
Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
574
Pub. Year:
1999
Page(from):
371
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994812 [1558994815]
Language:
English
Call no.:
M23500/574
Type:
Conference Proceedings

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