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Metal-organic chemical vapor deposition of metal oxides: From precursor synthesis to thin films

Author(s):
Belot, J. A.
Wang, A.
Edleman, N. L.
Babcock, J. R.
Metz, M. V.
Marks, T. J.
Markworth, P. R.
Chang, R. P. H.
3 more
Publication title:
Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
574
Pub. Year:
1999
Page(from):
37
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994812 [1558994815]
Language:
English
Call no.:
M23500/574
Type:
Conference Proceedings

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