Base-Catalyzed Photosensitive Polyimide
- Author(s):
McKean, D. R. Wallraff, G. M. Volksen, W. Hacker, N. P. Sanchez, M. I. Labadie, J. W. - Publication title:
- Polymers for microelectronics : resists and dielectrics
- Title of ser.:
- ACS symposium series
- Ser. no.:
- 537
- Pub. Year:
- 1994
- Page(from):
- 417
- Pub. info.:
- Washington, DC: American Chemical Society
- ISSN:
- 00976156
- ISBN:
- 9780841227217 [0841227217]
- Language:
- English
- Call no.:
- A05800/537
- Type:
- Conference Proceedings
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