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Top-Surface Imaging Using Selective Electroless Metallization of Patterned Monolayer Films

Author(s):
Calvert, J. M.
Dressick, W. J.
Dulcey, C. S.
Chen, M. S.
Georger, J. H.
Stenger, D. A.
Koloski, T. S.
Calabrese, G. S.
3 more
Publication title:
Polymers for microelectronics : resists and dielectrics
Title of ser.:
ACS symposium series
Ser. no.:
537
Pub. Year:
1994
Page(from):
210
Pub. info.:
Washington, DC: American Chemical Society
ISSN:
00976156
ISBN:
9780841227217 [0841227217]
Language:
English
Call no.:
A05800/537
Type:
Conference Proceedings

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