Plasma Etching

Plasma Etching

Author(s):

Publication title:

Introduction to microlithography : theory, materials, and processing

Title of ser.:

ACS symposium series

Ser. no.:

219

Pub. Year:

1983

Page(from):

215

Pub. info.:

Washington, D.C.: American Chemical Society

ISSN:

00976156

ISBN:

9780841207752 [0841207755]

Language:

English

Call no.:

A05800/219

Type:

Conference Proceedings

Details

TDL ID:	ZA00018007
Series ID:	PA00000004
Conf. info. (Name):	Meeting of the American Chemical Society
Conf. info. (Number):	185th
Conf. info. (Venue):	Seattle, WA, USA
Conf. info. (Date):	1983.03.20-1983.03.25

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