PLASMA SURFACE INTERACTIONS AND SURFACE PRORERTIES FOR REMOTE H-PLASMA CLEANING OF Si(100)

PLASMA SURFACE INTERACTIONS AND SURFACE PRORERTIES FOR REMOTE H-PLASMA CLEANING OF Si(100)

Author(s):

Publication title:

Surface chemical cleaning and passivation for semiconductor processing

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

315

Pub. Year:

1993

Page(from):

197

Pub. info.:

Pittsburgh, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992139 [1558992138]

Language:

English

Call no.:

M23500/315

Type:

Conference Proceedings

Details

TDL ID:	ZA00018004
Series ID:	PA00000011
Conf. info. (Name):	Symposium on surface chemical cleaning and passivation for semiconductor processing ; Materials Research Society Spring Meeting
Conf. info. (Number):	1993
Conf. info. (Venue):	San Francisco, California, USA
Conf. info. (Date):	1993.04.13-1993.04.15

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