Blank Cover Image

IMPLICATIONS OF SURFACE CONTAMINANTS IN A BPSG DEPOSITION AND REFLOW PROCESS

Author(s):
Publication title:
Surface chemical cleaning and passivation for semiconductor processing
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
315
Pub. Year:
1993
Page(from):
117
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992139 [1558992138]
Language:
English
Call no.:
M23500/315
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings PARTICLE MONITORING IN ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION BPSG FILMS

Li, J., Moinpour, M., Fardi, B., Lee, J., Thach, D., Lawrence, M., Dass, A., Moghadam, F.

Electrochemical Society
7 Conference Proceedings Dynamic Moisture Absorption Characterization Of TEOS/Ozone APCVD Si02 Films

Moinpour, M., Moghadam, F., Williams, B.

Electrochemical Society
2 Conference Proceedings ENHANCED ADHESION OF COPPER FILMS TO SiO2, PSG AND BPSG BY REFRACTORY METAL ADDITIONS

Rafalski, S. A., Spreitzer, R. L., Russell, S. W., Alford, T. L., Li, J., Moinpour, M., Moghadam, F., Mayer, J. W.

MRS - Materials Research Society
8 Conference Proceedings Defect Density Study of BPSG Reflow Process for 0.5 μm CMOS Technology in a Vertical Thermal Reactor

M. Shenasa, J.M. Coniff, J.P. Kudla

Electrochemical Society
3 Conference Proceedings AFM STUDIES OF SURFACE ROUGHNESS OF BOROPHOSPHOSILICATE GLASS (BPSG) FILMS AND THEIR IMPACT ON DEFECT DETECTION CAPABILITY FOR SUB MICRON VLSI TECHNOLOGY

Rojhantalab, H., Moinpour, M., Peter, N., Dass, M.L.A., Hough, W., Natter, R., Moghadam, F.

Materials Research Society
9 Conference Proceedings BPSG Reflow-Induced Suppression for Submicron VLSI Interconnect Technology

J. Coniff, M. Shenasa, L. Krott, S. Woessner

Electrochemical Society
4 Conference Proceedings BOROPHOSPHOSILICATE GLASS (BPSG) FUSION USING RAPID THERMAL ANNEALING AND STEAM REFLOW: PHYSICAL PROPERTIES AND DEVICE IMPLICATIONS

Maxim, M., Moinpour, M., Chu, J., Nguyen, H., Freiberger, P., Stenton, N.

MRS - Materials Research Society
10 Conference Proceedings Impact of surface treatment on resist reflow process

Y.-J. Yun, J.-H. Park, H. Choi, S. R. Park, K. Choi

Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings TEOS/Ozone APCVD Thin SiO2 Sub 0.5 mm LDD Spacer Applications

Moinpour, M., Lu, W.-J., Sadjadi, R., Li, J., Moghadam, F., Wada, O., Watt, V.H.C.

Electrochemical Society
11 Conference Proceedings Study on Induction Spontaneous Heating Reflow

H.B. Xu, M.Y. Li, J.M. Kim, H.B. Kim, D.W. Kim

Trans Tech Publications
6 Conference Proceedings IN SITU CONTAMINATION CONTROL INVESTIGATION OF SILICON NITRIDE LOW PRESSURE CHEMICAL VAPOR DEPOSITION PROCESS IN VERTICAL THERMAL REACTORS

Moinpour, Mansour, Bohannan, K., Shenasa, M., Sharif, A., Guzzo, G., Brestovansky, D.F., Markle, R.J., Wilkes, R.

Materials Research Society
12 Conference Proceedings Investigation of Pre-Tungsten Silicide Deposition Wet Chemical Processing

Philipossian, A., Moinpour, M., Wilkinson, R., Watt, V. H. C.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12