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Nanolithography Developed through Electron Beam Induced Surface Reaction

Author(s):
Matsui, S.
Ochiai, Y.
Baba, M.
Fujita, J.
Watanabe, H.
Manako, S.
Ohnishi, Y.
Ogai, K.
Kimura, Y.
Shimizu, R.
5 more
Publication title:
Materials - fabrication and patterning at the nanoscale : Symposium held April 19-20, 1995, San Francisco, California, USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
380
Pub. Year:
1995
Page(from):
49
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992832 [1558992839]
Language:
English
Call no.:
M23500/380
Type:
Conference Proceedings

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