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Real-Time Monitoring of Semiconductor Growth by Spectroscopic Ellipsometry

Author(s):
Johs, B.
Hale, J.
Herzinger, C.
Doctor, D.
Elliott, K.
Olson, G.
Chow, D.
Roth, J.
Ferguson, I.
Pelczynski, M.
Kuo, C. H.
Johnson, S.
7 more
Publication title:
In situ process diagnostics and intelligent materials processing : symposium held December 2-5, 1997, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
502
Pub. Year:
1998
Page(from):
3
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994072 [1558994076]
Language:
English
Call no.:
M23500/502
Type:
Conference Proceedings

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