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Preparation and Residual Stress Characterization of Polycrystalline Silicon Germanium Films Grown by Atmospheric Pressure Chemical Vapor Deposition

Author(s):
Publication title:
Polycrystalline thin films : structure, texture, properties and applications III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
472
Pub. Year:
1997
Page(from):
227
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993761 [1558993762]
Language:
English
Call no.:
M23500/472
Type:
Conference Proceedings

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