A Novel Infrared SiGe/Si Heterojunction Detector with an Ultrathin Phosphorous Barrier Grown by Atomic Layer Deposition

A Novel Infrared SiGe/Si Heterojunction Detector with an Ultrathin Phosphorous Barrier Grown by Atomic Layer Deposition

Author(s):

Banisch, R.

Publication title:

Infrared applications of semiconductors - materials, processing, and devices : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

450

Pub. Year:

1997

Page(from):

213

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993549 [1558993541]

Language:

English

Call no.:

M23500/450

Type:

Conference Proceedings

Details

TDL ID:	ZA00017991
Series ID:	PA00000011
Conf. info. (Name):	Symposium on infrared applications of semiconductors
Conf. info. (Number):	1996
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1996.12.02-1996.12.05

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