Low Temperature Oxidation of Silicon after Copper Ion Implantation

Low Temperature Oxidation of Silicon after Copper Ion Implantation

Author(s):

Jaquez, E. J.

Publication title:

Thermodynamics and kinetics of phase transformations : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

398

Pub. Year:

1996

Page(from):

189

Pub. info.:

Pittsburgh, Penn.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993013 [1558993010]

Language:

English

Call no.:

M23500/398

Type:

Conference Proceedings

Details

TDL ID:	ZA00017986
Series ID:	PA00000011
Conf. info. (Name):	Symposium on thermodynamics and kinetics of phase transformations
Conf. info. (Number):	1995
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1995.11.27-1995.12.01

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