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STRUCTURAL AND ELECTRICAL PROPERTIES OF UNDOPED MICROCRYSTALLINE SILICON GROWN BY 70 MHz AND 13.56 MHz PECVD

Author(s):
Fluckiger, R.
Meier, J.
Crovini, G.
Demichelis, F.
Giorgis, F.
Pirri, C. F.
Tresso, E.
Pohl, J.
Rigato, V.
Zandolin, S.
Caccavale, F.
6 more
Publication title:
Microcrystalline and nanocrystalline semiconductors : Symposium held November 29-December 2, 1994, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
358
Pub. Year:
1995
Page(from):
751
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992597 [1558992596]
Language:
English
Call no.:
M23500/358
Type:
Conference Proceedings

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