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LARGE GRAIN SIZE AND HIGH DEPOSITION RATE FOR MICROCRYSTALLINE SILICON PREPARED BY VHF-GD

Author(s):
Publication title:
Microcrystalline and nanocrystalline semiconductors : Symposium held November 29-December 2, 1994, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
358
Pub. Year:
1995
Page(from):
745
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992597 [1558992596]
Language:
English
Call no.:
M23500/358
Type:
Conference Proceedings

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