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IN-SITU ELLIPSOMETRIC MONITORING OF THE ELECTRON CYCLOTRON RESONANCE ETCHING OF DIAMOND-LIKE CARBON

Author(s):
Publication title:
Novel forms of carbon II : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
349
Pub. Year:
1994
Page(from):
535
Pub. info.:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992498 [1558992499]
Language:
English
Call no.:
M23500/349
Type:
Conference Proceedings

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