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Application of large-scale active microvibration control system using piezoelectric actuators to semiconductor manufacturing equipment

Author(s):
Publication title:
Smart structures and materials 1997 : industrial and commercial applications of smart structures technologies : 4-6 March 1997, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3044
Pub. Year:
1997
Page(from):
258
Page(to):
269
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424570 [0819424579]
Language:
English
Call no.:
P63600/3044
Type:
Conference Proceedings

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