Spectroellipsometric study of amorphous thin films
- Author(s):
- Yamaguchi,T. ( Shizuoka Univ. )
- Jayatissa,A.H.
- Kawanishi,K.
- Aoyama,M.
- Publication title:
- International Symposium on Polarization Analysis and Applications to Device Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2873
- Pub. Year:
- 1996
- Page(from):
- 188
- Page(to):
- 191
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819422712 [0819422711]
- Language:
- English
- Call no.:
- P63600/2873
- Type:
- Conference Proceedings
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