Development of advanced process for halftone phase-shift mask fabrication with electron-beam exposure systems
- Author(s):
- Komada,M. ( Dai Nippon Printing Co.,Ltd. )
- Kurihara,M.
- Sasaki,S.
- Makabe,T.
- Hayashi,N.
- Publication title:
- Photomask and X-Ray Mask Technology III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2793
- Pub. Year:
- 1996
- Page(from):
- 115
- Page(to):
- 126
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819421791 [0819421790]
- Language:
- English
- Call no.:
- P63600/2793
- Type:
- Conference Proceedings
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