Thick polysilicon-based surface micromachined capacitive accelerometer with force-feedback operation

Thick polysilicon-based surface micromachined capacitive accelerometer with force-feedback operation

Author(s):

Wenk,B. ( Fraunhofer-Institut fur Siliziumtechnologie )

Publication title:

Micromachined Devices and Components

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2642

Pub. Year:

1995

Page(from):

84

Page(to):

94

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420084 [0819420085]

Language:

English

Call no.:

P63600/2642

Type:

Conference Proceedings

Details

TDL ID:	ZA00017939
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Micromachined Devices and Components
Conf. info. (Number):	1995
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1995.10.23-1995.10.24

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