Mechanical and optical characterization of thermal microactuators fabricated in a CMOS process
- Author(s):
- III,B.C.Read ( Air Force Institute of Technology )
- Bright,V.M.
- Comtois,J.H.
- Publication title:
- Micromachined Devices and Components
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2642
- Pub. Year:
- 1995
- Page(from):
- 22
- Page(to):
- 32
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420084 [0819420085]
- Language:
- English
- Call no.:
- P63600/2642
- Type:
- Conference Proceedings
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