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Thermal microactuators for surface-micromachining processes

Author(s):
Publication title:
Micromachined Devices and Components
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2642
Pub. Year:
1995
Page(from):
10
Page(to):
21
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420084 [0819420085]
Language:
English
Call no.:
P63600/2642
Type:
Conference Proceedings

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