Improved polysilicon surface-micromachined micromirror devices using chemical-mechanical polishing
- Author(s):
- Hetherington, Dale L. ( Sandia National Laboratories )
- Sniegowski, Jeffry J.
- Publication title:
- Photonics for space environments VI : 22 July 1998, San Diego, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3440
- Pub. Year:
- 1998
- Page(from):
- 148
- Page(to):
- 153
- Pub. info.:
- Bellingham, Wash.: SPIE
- ISSN:
- 0277786X
- ISBN:
- 9780819428950 [0819428957]
- Language:
- English
- Call no.:
- P63600/3440
- Type:
- Conference Proceedings
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