UV laser modifications and etching of thin polymer films in different environments

Author(s):

• Bityurin,N.M. ( Institute of Applied Physics(Russia) )
• Muraviov,S.V. ( Institute of Applied Physics(Russia) )
• Alexandrov,A.P. ( Institute of Applied Physics(Russia) )
• Bronnikova,N.G. ( Institute of Applied Physics(Russia) )
• Malyslnev,A. ( Institute of Applied Physics(Russia) )

Publication title:

Nonresonant laser-matter interaction (NLMI-9) : 1-3 July, 1996, St. Petersburg-Pushkin, Russia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3093

Pub. Year:

1997

Page(from):

108

Page(to):

116

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819425089 [0819425087]

Language:

English

Call no.:

P63600/3093

Type:

Conference Proceedings