Optical thin films using LPCVD and thermal reoxidation techniques

Optical thin films using LPCVD and thermal reoxidation techniques

Author(s):

Chao,H.C. ( National Dong Hwa Univ.(Taiwan) )
Wu,Y.T. ( National Dong Hwa Univ.(Taiwan) )
Wang,W. ( National Dong Hwa Univ.(Taiwan) )

Publication title:

Optical thin films V : new developments : 30 July-1 August 1997, San Diego, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3133

Pub. Year:

1997

Page(from):

226

Page(to):

229

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819425553 [0819425559]

Language:

English

Call no.:

P63600/3133

Type:

Conference Proceedings

Details

TDL ID:	ZA00017873
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Optical Thin Films
Conf. info. (Number):	1997 : 5th
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	1997.07.31-1997.08.01

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