New method for end-point detection in reactive ion etching of polysilicon
- Author(s):
- Aslam,S. ( NASA Goddard Space Flight Ctr. )
- Das,N.C. ( NASA Goddard Space Flight Ctr. )
- Hughes STX ( NASA Goddard Space Flight Ctr. )
- Shu,P.K. ( NASA Goddard Space Flight Ctr. )
- Publication title:
- Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3213
- Pub. Year:
- 1997
- Page(from):
- 73
- Page(to):
- 78
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426451 [0819426458]
- Language:
- English
- Call no.:
- P63600/3213
- Type:
- Conference Proceedings
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