Singl-sided multilevel structure for silicon pressure transducers by masked-maskless etching technology

Singl-sided multilevel structure for silicon pressure transducers by masked-maskless etching technology

Author(s):

Yang,H. ( Fudan Univ.(China) )
Ren,J. ( Fudan Univ.(China) )
Bao,M. ( Fudan Univ.(China) )
Shen,S. ( Fudan Univ.(China) )

Publication title:

Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3223

Pub. Year:

1997

Page(from):

185

Page(to):

188

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426550 [0819426555]

Language:

English

Call no.:

P63600/3223

Type:

Conference Proceedings

Details

TDL ID:	ZA00017865
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Micromachining and Microfabrication Process Technology
Conf. info. (Number):	1997 : 3rd
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1997.09.29-1997.09.30

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